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国产高能量电子枪的研发

Development of domestic high energy electron gun

  • 摘要: 文章介绍了自主研发的高能量电子枪的原理、设计和测试结果。该电子枪主要由电子发射组件、电磁聚焦组件、电磁偏转组件、差分抽真空维持机构和控制电源构成,可以发射、聚焦并偏转高能量电子。测试结果显示,电子枪发射的电子能量最大可达30 keV,加速电压和发射电流成正比例对应关系,电子束斑直径在100 μm以下,电子束偏转角度大于5°。通过实测Si(111)单晶体,获得了良好的电子衍射图像。

     

    Abstract: The principle, design and test results of a domestically made high-energy electron gun are described. It consists mainly of a filament, electromagnetic focusing lens, electromagnetic deflection lens, differential vacuum pumping unit, and power supply. It is capable of producing high energy electrons up to 30keV. The electron beam can be deflected more than 5° and the beam size focused to less than 100μm. The acceleration voltage is found to be directly proportional to the emission current. Details of the design and test results are reported.

     

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