Abstract: Scanning probe microscope (SPM), which includes scanning tunneling microscope (STM) and atomic force microscope (AFM), can obtain the morphology and rich physical properties of surfaces at atomic and molecular scales via raster-scanning the sample with a sharp tip. Since its invention, SPM has led to a paradigm shift in the understanding and perception of matter. In recent years, the emergence of qPlus-type force sensors with high-quality factor has pushed the resolution and sensitivity of SPM to a new level, providing unprecedented opportunities for the precise detection and manipulation of chemical structures, charge states, electronic states, and spin states. Here we will first briefly describe the historical development and basic working principles of AFM, then focus on the advantages of qPlus-AFM and its representative applications in single atoms, single molecules and low-dimensional materials. Finally, we give an overview of its future development trends and potential applications.