高级检索

纳米光刻技术的现状和未来

The present and future of nanolithography

  • 摘要: 纳米技术是21世纪信息科学的一项关键技术,纳米结构制作是纳米技术的重要组成部分.纳米光刻技术是制作纳米结构的基础,具有重要的应用前景.文章对光学光刻技术进行了概述,介绍了几种纳米光刻技术的新途径、发展现状和关键问题,最后讨论了纳米光刻技术的应用前景.

     

    Abstract: Nanotechnology will play a key role in information science in the 21st century. The fabrication of nanostructures, an important part of nanotechnology, is based upon nanolithography which will be widely employed in the future. We shall first briefly review optical lithography, then describe the development and key issues of several new methods of nanolithography. Prospective applications of nanolithography are discussed at the end.

     

/

返回文章
返回