脉冲高能量密度等离子体材料表面改性及其应用
Surface modification of materials by pulsed high energy density plasma and its applications
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摘要: 脉冲高能量密度等离子体(pulsed high energy density plasma, PHEDP)是一项新的材料表面改性技术.它集高电子温度、高能量密度、高定向速度于一身,在制备薄膜时具有沉积薄膜的温度低、沉积效率高、能量利用率高的优点,并兼具表面溅射、离子注入、冲击波和强淬火效应等综合效应;它可以制备纳米晶或非晶硬质薄膜,提高基底材料的表面硬度和耐磨、耐蚀性能;能够实现非金属材料表面金属化,所制备薄膜与基底之间存在很宽的混合过渡区,因此膜/基结合良好.文章主要介绍了作者近年来在该领域的部分研究成果,简要介绍了脉冲高能量密度等离子体的原理、特点及应用.分析了脉冲等离子体与材料相互作用的基本物理现象.
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关键词:
- 等离子体 /
- 脉冲高能量密度等离子体 /
- 综述 /
- 表面改性
Abstract: Pulsed high energy density plasma (PHEDP) is a new technology for material surface modification which combines high electron temperature, high energy density, and high velocity. It is characterized by a low deposition temperature, high deposition efficiency, and high-energy usage during film fabrication; and is accompanied by surface sputtering, ion implantation, shock waves, and intensive quenching. The PHEDP technology can be used to prepare various nanocrystalline and amorphous hard films, with improved surface hardness and wear and corrosion resistance of the substrate. Non-metallic materials can also be metallized by this technology. The PHEDP deposited films have good adhesion between the film and substrate, which can be attributed to the wide mixed transition zone between them. In this paper we describe some of our research results in this field. The fundamental principle, characteristics and application of PHEDP are briefly reviewed, and the basic physics of the interaction between the pulsed plasma and materials is analyzed.-
Keywords:
- plasma /
- pulsed high energy density plasma /
- review /
- surface modification
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