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相变型半导体存储器研究进展

Phase-change semiconductor memories

  • 摘要: 文章系统地介绍了相变型半导体存储器的原理、相变材料、特点、器件结构设计、研究现状及面临的几个关键器件工艺问题.C-RAM由于具有非易失性、循环寿命长、元件尺寸小、功耗低、可多级存储、高速读取、抗辐照、耐高低温、抗振动、抗电子干扰和制造工艺简单等优点,被认为最有可能取代目前的FLASH、DRAM和SRAM而成为未来半导体存储器主流产品.

     

    Abstract: A review is presented of phase-change semiconductor memories, including their principle of operation, major advantages, device structure design, phase-change materials, current research and key fabrication techniques. Due to its advantages of nonvolatility, high cycling capability, small cell size, low cell energy consumption, multilevel storage, high read rate, superior radiation/vibration/electron-disturbance tolerance, superior high/low temperature tolerance and simple cell structure with high scalability, C-RAMs have the highest potential to replace all kinds of current memory devices such as flash memories, dynamic random access memories, and static random access memories in the future.

     

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