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微纳米加工技术及其应用综述

Overview of micro/nanofabrication technologies and applications

  • 摘要: 材料与结构在微纳米尺度展现了许多不同于宏观尺度的新特征,纳米技术已经成为当前科学研究与工业开发的热门领域之一.微小型化依赖于微纳米尺度的功能结构与器件,实现功能结构微纳米化的基础是先进的微纳米加工技术.文章对微纳米加工技术做了一个综合的介绍,简要说明了微纳米加工技术与传统加工技术的区别.在微纳米加工技术的应用方面提出了一些合理选择加工技术的原则,并对当前微纳米加工技术面临的挑战和今后发展的趋势作了预测.

     

    Abstract: It has been revealed that materials and structures on the micro and nanometer scale demonstrate many characteristics different from their macro dimensions. Nanotechnology has become a hot topic in current research and industrial applications. Miniaturisation relies on functional structures and devices of micro and nanometer dimensions. An overview is presented of micro/nanofabrication technologies which are the basis for the realisation of micro and nanoscale structures. A brief description of the difference between such fabrication and conventional machining is given, and a few principles on how to choose an appropriate micro/nanofabrication technology for a specific application are suggested. Current challenges are presented, together with a prediction of future developments.

     

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