Abstract: Nanoscale materials exhibit novel physical properties different from macro systems, which has led to the rise of nanoscience and nanotechnology. It is necessary to develop appropriate methods to study the properties of such materials and their potential applications. Micro/nanofabrication technologies offer a controllable approach for patterning the structures and devices down to the nanometer scale, and are rapidly finding applications in many fields. We review some current examples in the research on nanoscale physics and devices.