Abstract: Great interest is focused on femtosecond laser micro-nano fabrication due to the ultra-short time scale and ultra-high peak power density characteristics of the femtosecond lasers. Very high resolution and accuracy can be achieved when working with rigid materials and liquid resin. In this paper We introduce the progress of femtosecond laser precise micro-nano fabrication. Two different fabrication mechanisms are described including laser ablation and two photopolymerization. Finally, the prospect of femtosecond laser fabrication is discussed.